Precise Quality Control Via Optical Inspection
Single-point Compact Optical Sensor
The measurement of wafer in the field of semiconductor and generally microelectronics.
The measurement and online control of mechanical or optical parts.
The measurement and control of glass or plastic film thickness.
Our new sensor WLS performs non-contact distance and thickness measurements in proven accuracy. Thus, the device is perfectly customized for applications like determination of position and dimensions (e.g. for microelectronic components), topography, profile and roughness measurements (e.g. for tool surfaces) and thickness measurements of glass coatings.
The WLS offers great flexibility in a small space. The exceptionally compact control unit and the optical probes are connected by an optical fiber. This makes it possible to spatially separate the optical probe from the control unit. Furthermore, the probe does not contain any moving parts or electronic components that could influence the accuracy of the measurement as hear sources.
Thanks to its compact dimensions and economical price, the WLS is the ideal alternative to conventional laser triangulation sensors.
| VAS 500 | VIS 600 | VIS 4K | VIS 10K | |
| Measuring Range | 500 μm | 600 μm | 4 mm | 10 mm |
| Working Distance 1) | 12.7±0.5 mm | 6.5 mm | 37.5 ± 0.9 mm | 69 ± 1.7 mm |
| Thickness Measuring Range 2) | Up to 0.75 mm | Up to 900 μm | Up to 6 mm | Up to 15 mm |
| Axial Resolution | 20 nm | 3 nm | 180 nm | 400 nm |
| Linearity | 170 nm | 198 nm | 1.4 μm | 4 μm |
| Lateral Resolution | 2.5 μm | 2 μm | 4 μm | 16 μm |
| Measuring Angle to the Surface 3) | 90°±45° | 90°±30° | 90°± 20° | 90°± 14° |
| Weight | 250 g | 71 g | 162 g | 209 g |
Remarks:
1) Bottom of optical probe to middle of measuring range.
2) Refractive index n = 1.5 on transparent material.
3) Decreasing accuracy for large incident angles.
The given data was generated for a typical application and may be different given other circumstances.
EFFICIENT
Cost-efficient solution
State-of-the-art chromatic confocal technology
Measurement on all surfaces
No shadowing due to coaxial measurement
VERSATILE
Simple to integrate
Optical probe and controller are separate
Maintenance free and robust
Small footprint
USER-FRIENDLY & SAFE
Insensitive to heat and pollution
Light weight
Low power consumption
